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Q: is molybdenum a conductor?
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Asked 10/16/2010 11:17:12 AM
Updated 10/16/2010 12:41:37 PM
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A composite conductive structure in integrated circuit devices is described. The composite conductive structure includes an insulating substrate on which is provided a conductor of a refractory metal substantially nonreactive with silicon dioxide. A layer of a silicide of the refractory metal covers the conductor and a layer of silicon dioxide covers the layer of the silicide. A method of making such structures is also described.
Added 10/16/2010 11:25:16 AM
Yes.
Added 10/16/2010 12:41:37 PM
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